Journal of Micro-Nanolithography MEMS and MOEMS
期刊信息导读
- Journal of Micro-Nanolithography MEMS and MOEMS基本信息
- Journal of Micro-Nanolithography MEMS and MOEMS中科院SCI期刊分区
- 历年Journal of Micro-Nanolithography MEMS and MOEMS影响因子趋势图
- Journal of Micro-Nanolithography MEMS and MOEMS期刊英文简介
- Journal of Micro-Nanolithography MEMS and MOEMS期刊中文简介
Journal of Micro-Nanolithography MEMS and MOEMS基本信息
简称:J MICRO-NANOLITH MEM
研究方向:工程技术
2018-2019最新影响因子:1.193
2022年6月28日更新影响因子:1.167
SCI类别:SCIE
是否OA开放访问:No
出版地:UNITED STATES
出版周期:Quarterly
创刊年份:2007
年文章数:77
涉及的研究方向:工程技术-工程:电子与电气
通讯方式:SPIE-SOC PHOTOPTICAL INSTRUMENTATION ENGINEERS, 1000 20TH ST, PO BOX 10, BELLINGHAM, USA, WA, 98225
官方网站:http://www.spie.org/publications/journals/journal-of-micro/nanolithography-mems-and-moems
投稿网址:https://jm3.msubmit.net/cgi-bin/main.plex
审稿速度:较慢,6-12周
平均录用比例:容易
PMC链接:http://www.ncbi.nlm.nih.gov/nlmcatalog?term=1932-5150%5BISSN%5D
Journal of Micro-Nanolithography MEMS and MOEMS期刊英文简介
The Journal of Micro-Nanolithography MEMS and MOEMS (JM3) publishes papers on the science, development, and practice of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, MEMS, MOEMS, and photonics industries. The wide range of such devices includes biomedical microdevices, microfluidics, sensors and actuators, adaptive optics, and digital micromirrors. The scope is broad to facilitate synergy and interest between the communities served by the journal.
Journal of Micro-Nanolithography MEMS and MOEMS期刊中文简介
《微纳米光刻机MEMS和MOEMS杂志》(JM3)发表了有关光刻、制造、包装和集成技术的科学、发展和实践的论文,以满足电子、MEMS、MOEMS和光子学行业的需要。这类装置的范围很广,包括生物医学微装置、微流体、传感器和执行器、自适应光学和数字微镜。范围广泛,有助于促进期刊服务的社区之间的协同作用和利益。
中科院SCI期刊分区:
Journal of Micro-Nanolithography MEMS and MOEMS影响因子
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